Ụkpụrụ Plasma Etcher

Plasma Etch jikọtara nke ọma (ICPE) bụ nsonaazụ nke ngwakọta kemịkalụ na usoro anụ ahụ. Ụkpụrụ ya bụ isi bụ na, n'okpuru oghere na nrụgide dị ala, ugboro redio nke ọkụ ICP RF na-emepụta na-apụta na eriri eriri toroidal. Agwakọtara gas etching n'otu akụkụ na mwepu na-egbuke egbuke, na-ebute plasma dị elu{2}. N'okpuru mmetụta nke RF na ala electrode, plasma a na-atụ bọmbụ n'elu ala, na-agbaji njikọ kemịkalụ nke ihe semiconductor na mpaghara ihe atụ nke mkpụrụ. Ihe ndị a na-agbanwe agbanwe na-emeghachi omume na gas etching na-emepụta ogige ndị na-agbanwe agbanwe, nke na-ekewapụ na mkpụrụ ahụ dị ka gas ma na-esi na eriri ahụ pụta.